Research on the Resonant Frequency Formula of V-Shaped Cantilevers

被引：7
|
作者：
Yang, Kai [1 ]
Li, Zhigang [1 ]
Jing, Yupeng [1 ]
Chen, Dapeng [1 ]
Ye, Tianchun [1 ]
机构：
[1] Chinese Acad Sci, Inst Microelect, Lab Silicon Devices & Integrated Technol, Beijing 100864, Peoples R China
来源：
2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2 | 2009年
关键词：
cantilever; fundamental resonant frequency; triangular; V-shaped;
D O I：
10.1109/NEMS.2009.5068527
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.
引用
收藏
页码：59 / 62
页数：4
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