High resolution 3D woodpile structures by Direct fs Laser Writing

被引：3

作者：

Sakellari, Ioanna ^{[1
]}

Kabouraki, Elmina ^{[2
,3
]}

Gray, David ^{[2
]}

Fotakis, Costas ^{[2
,4
]}

Pikulin, Alexander ^{[5
]}

Bityurin, Nikita ^{[5
]}

Vamvakaki, Maria ^{[2
,3
]}

Farsari, Maria ^{[2
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[2] BIESL FORTH, Iraklion, NE, Greece

[3] Univ Crete, Dept Mat Sci & Technol, Iraklion, NE, Greece

[4] Univ Crete, Dept Phys, Iraklion, NE, Greece

[5] Russian Acad Sci, Institute Appl Phys, Nizhnii Novgorod, Russia

来源：

NANOPHOTONIC MATERIALS IX | 2012年 / 8456卷

关键词：

direct laser writing; photonic crystals; quenching; two - photon polymerization; 2-PHOTON POLYMERIZATION; SHRINKAGE; LAYER;

D O I：

10.1117/12.930155

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel organic-inorganic hybrid material is presented containing a quenching moiety for improving the resolution of Direct femtosecond Laser Writing by multi-photon polymerization. By exploiting the diffusion of the quencher molecule for confining radical diffusion in the scanned area, sub-100nm resolution is achieved. 3D woodpile structures with rod spacing of 400nm are successfully fabricated. We optically characterize these woodpiles structures and we show that they exhibit well-ordered diffraction patterns and stopgaps down to near-infrared wavelengths.

引用

页数：10

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