Simulation and fabrication of nitride-based moth-eye light emitting diodes - art. no. 61151Y

被引：0
|
作者：
Nakashima, M. [1 ]
Kasugai, H. [1 ]
Deguchi, A. [1 ]
Balakrishnan, K. [1 ]
Iwaya, M. [1 ]
Kamiyama, S. [1 ]
Amano, H. [1 ]
Akasaki, I. [1 ]
机构：
[1] Meijo Univ, 21st Century COE Program Nanofactory, Tempaku Ku, Nagoya, Aichi 4688502, Japan
来源：
Physics and SImulation of Optoelectronic Devices XIV | 2006年 / 6115卷
关键词：
light extraction efficiency; moth-eye structure; RCWA; nitrides; LED;
D O I：
10.1117/12.661181
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Light extraction efficiency of nitride-based blue-light-emitting diodes on SiC substrate is theoretically investigated using rigorously coupled wave analysis method. Rigidly periodic moth eye structure is found to show superior light extraction efficiency compared with conventional rectangular parallelepiped or pseudo-moth eye structures. High-throughput technology by laser interference lithography for the fabrication of rigidly periodic moth eye structure is established using a 244 nm laser as the light source.
引用
收藏
页码：Y1151 / Y1151
页数：8
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