Fabrication and characterization of nitride-based blue light-emitting diodes on moth-eye patterned sapphire substrate (MPSS)

被引：0

作者：

Tsuchiya, T. ^{[1
]}

Umeda, S. ^{[1
]}

Sowa, M. ^{[1
]}

Kondo, T. ^{[2
]}

Kitano, T. ^{[2
]}

Mori, M. ^{[2
]}

Suzuki, A. ^{[2
]}

Naniwae, K. ^{[2
]}

Sekine, H. ^{[4
]}

Iwaya, M. ^{[1
]}

Takeuchi, T. ^{[1
]}

Kamiyama, S. ^{[1
]}

Akasaki, I. ^{[1
,3
]}

机构：

[1] Meijo Univ, Fac Sci & Technol, Tenpaku Ku, 1-501 Shiogamaguchi, Nagoya, Aichi 4688502, Japan

[2] EL SEED Corp, Nagoya, Aichi 464, Japan

[3] Nagoya Univ, Akasaki Res Ctr, Nagoya, Aichi 464, Japan

[4] DIC Corp, Tokyo 103, Japan

来源：

LIGHT-EMITTING DIODES: MATERIALS, DEVICES, AND APPLICATIONS FOR SOLID STATE LIGHTING XVII | 2013年 / 8641卷

关键词：

PSS; Moth-eye; UV-nanoimprinting technique; dry etching; LEDs; LITHOGRAPHY;

D O I：

10.1117/12.2003527

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication procedure of a moth-eye patterned sapphire substrate (MPSS), which can enhance the light extraction efficiency of nitride-based light emitting diodes (LEDs) has been examined. The optimization of surface morphology after the etching of the MPSS for high-quality GaN growth was also performed. Then, we fabricated MPSS samples with a fixed pitch of 460nm, and corn height ranging from 50 to 350nm. The light extraction efficiency of blue-LEDs grown on a series of MPSS was enhanced about 1.4 times compared with the devices grown on a flat sapphire substrate. We found that if corn height exceeds 150nm, the MPSS effect is sufficiently observed.

引用

页数：7

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