Wavelength dependence of crystallization of alkoxy-derived ZrO2 thin films prepared by ultraviolet irradiation

被引：5
|
作者：
Nishizawa, K [1 ]
Miki, T [1 ]
Suzuki, K [1 ]
Kato, K [1 ]
机构：
[1] AIST, Moriyama Ku, Nagoya, Aichi 4638560, Japan
来源：
JOURNAL OF MATERIALS RESEARCH | 2005年 / 20卷 / 11期
关键词：
D O I：
10.1557/JMR.2005.0392
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Wavelength dependence was observed in the ultraviolet (UV) irradiation-assisted crystallization of alkoxy-derived ZrO2 thin films. The Surface grains of thin films deposited on Si(100) Substrates became enlarged by UV irradiation using ail ultrahigh-pressure mercury larnp. The crystallinity of thin films deposited on Si(100) substrates was improved by UV irradiation using a low-pressure mercury lamp. The reaction using the ultrahigh-pressure mercury lamp depended on the Substrate type.
引用
收藏
页码：3133 / 3140
页数：8
相关论文
共 50 条
  • [41] ZrO2 thin films on Si substrate
    Wong, Yew Hoong
    Cheong, Kuan Yew
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2010, 21 (10) : 980 - 993
  • [42] The Structure and Characterization of ZrO2 Thin Films Prepared by Liquid Delivery-MOCVD
    Li, Rui
    Xie, Dan
    Zhang, Mingming
    Han, Xueguang
    Lin, Huiwang
    Ren, Tianling
    Liu, Litian
    FERROELECTRICS, 2010, 407 : 140 - 145
  • [43] Dynamic scaling in growth of ZrO2 thin films prepared by electronic beam evaporation
    Qi, HJ
    Huang, LH
    Yuan, JM
    Cheng, CF
    Shao, JD
    Fan, ZX
    CHINESE PHYSICS LETTERS, 2003, 20 (05) : 709 - 712
  • [44] Tribological behaviors of ZrO2 thin films prepared by Langmuir-Blodgett technique
    Zhang, Xiaofeng
    Ye, Bin
    Dai, Shuxi
    Du, Zuliang
    Zhang, Pingyu
    Run Hua Yu Mi Feng/Lubrication Engineering, 2006, (07): : 82 - 83
  • [45] Structural and optical properties of thin films prepared from surface modified ZrO2
    Asilturk, Meltem
    Burunkaya, Esin
    Sayilkan, Funda
    Kiraz, Nadir
    Arpac, Ertugrul
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2011, 357 (01) : 206 - 210
  • [46] Microstructural and electrical properties of ZrO2 thin films prepared on silicon on insulator with thin top silicon
    Zhang, NL
    Song, ZT
    Shen, QW
    Lin, CL
    CHINESE PHYSICS LETTERS, 2003, 20 (02) : 273 - 276
  • [47] Crystalline ZrO2 monoliths with well-defined macropores and mesostructured skeletons prepared by combining the alkoxy-derived sol-gel process accompanied by phase separation and the solvothermal process
    Konishi, Junko
    Fujita, Koji
    Oiwa, Satoshi
    Nakanishi, Kazuki
    Hirao, Kazuyuki
    CHEMISTRY OF MATERIALS, 2008, 20 (06) : 2165 - 2173
  • [48] Effects of composition on crystallographic properties of alkoxy-derived (Y,Yb)MnO3 thin films
    Suzuki, K
    Nishizawa, K
    Miki, T
    Kato, K
    ASIAN CERAMIC SCIENCE FOR ELECTRONICS II AND ELECTROCERAMICS IN JAPAN V, PROCEEDINGS, 2002, 228-2 : 141 - 146
  • [49] Construction of MFIS Structure Using Alkoxy-Derived (Y,Yb)MnO3 Thin Films
    Suzuki, K
    Tanaka, K
    Fu, DS
    Nishizawa, K
    Miki, T
    Kato, K
    ELECTROCERAMICS IN JAPAN VII, 2004, 269 : 49 - +
  • [50] Thermoluminescence of Eu-doped ZrO2 thin films exposed to ultraviolet and visible light
    Azorin, J
    Rivera, T
    Martinez, E
    Garcia, M
    RADIATION MEASUREMENTS, 1998, 29 (3-4) : 315 - 317
12345