Modulation interference microscope as a tool for measuring the linear dimensions of nanostructures

被引：0
|
作者：
Andreev, A. G. [1 ]
Grigoriev, S. N. [1 ]
Romash, E. V. [1 ]
Bushuev, S. V. [1 ]
Ignatiev, P. S. [1 ]
Loparev, A. V. [1 ]
Indukaev, K. V. [1 ]
Osipov, P. A. [1 ]
机构：
[1] Moscow State Technol Univ STANKIN, Moscow, Russia
来源：
MEASUREMENT TECHNIQUES | 2012年 / 55卷 / 05期
关键词：
modulation interference microscope; nanometrology; RESOLUTION;
D O I：
10.1007/s11018-012-9996-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new version of a modulation interference microscope with long-path coordinate table resting on aeromagnetic guides that enables travel of the microscope with deviation from linearity of at most 0.1 mu m on path lengths up to 300 mm has been developed. The metrological aspects of the use of the microscope for measurement of the linear dimensions of nanostructures are considered. Results of measurements of the basic parameters of the topology of integrated circuits are presented.
引用
收藏
页码：542 / 545
页数：4
相关论文
共 50 条
  • [31] Evaluation of a Tool for Measuring Temporal Modulation Detection
    Landsberger, David M.
    Stupak, Natalia
    EAR AND HEARING, 2022, 43 (02): : 448 - 459
  • [32] INSTRUMENTS FOR MEASURING THE MODULATION-TRANSFER FUNCTIONS OF MICROSCOPE OBJECTIVES
    ARSENEV, AA
    LARINA, RM
    PLAGOV, GS
    EGOROVA, OV
    SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1981, 48 (01): : 19 - 22
  • [33] Michelson microscope interference objective for micro-structure topography measuring
    Hernandez, K.
    Rodriguez-Vera, R.
    Rayas, J.
    22ND CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: LIGHT FOR THE DEVELOPMENT OF THE WORLD, 2011, 8011
  • [34] Measuring Concentricity and Coaxial Tolerance of Nozzle and Cavity With Tool Microscope
    Lu, Xizhao
    Jiang, Feng
    Ye Ruifang
    Lei, Tingping
    SEVENTH INTERNATIONAL SYMPOSIUM ON PRECISION MECHANICAL MEASUREMENTS, 2016, 9903
  • [35] Prospects of the rolling method for measuring linear displacements and dimensions
    Ivanov, BN
    MEASUREMENT TECHNIQUES, 1996, 39 (05) : 497 - 500
  • [36] SELECTING PARAMETERS OF PNEUMATIC FACILITIES FOR MEASURING LINEAR DIMENSIONS
    VYSOTSKII, AV
    KUROCHKIN, AP
    NOSKIN, EL
    CHUDOV, VA
    MEASUREMENT TECHNIQUES, 1977, 20 (06) : 794 - 805
  • [37] OPTICAL-INSTRUMENTS FOR MEASURING LINEAR DIMENSIONS IN ENGINEERING
    NOVIKOV, VP
    SLEPUKHOV, SV
    MEASUREMENT TECHNIQUES, 1978, 21 (10) : 1436 - 1439
  • [38] PNEUMATIC PRIMARY SENSOR FOR MEASURING LINEAR DIMENSIONS.
    Salov, I.D.
    Measurement Techniques, 1986, 29 (11) : 1023 - 1024
  • [39] AUTOMATIC TRIMMING OF MEASURING SYSTEMS FOR TESTING LINEAR DIMENSIONS
    GEILER, ZS
    FROLOV, YA
    MEASUREMENT TECHNIQUES-USSR, 1970, (01): : 49 - &
  • [40] AN ALGORITHM FOR OPTIMAL SELECTION OF DEVICES FOR MEASURING LINEAR DIMENSIONS
    PANOVA, EI
    MEASUREMENT TECHNIQUES USSR, 1992, 35 (01): : 33 - 36
12345