Properties of ZnO/W-doped In2O3/ZnO multilayer thin films deposited at different growth temperatures

被引：6
|
作者：
Gupta, R. K. [1 ]
Ghosh, K. [1 ]
Patel, R. [2 ]
Kahol, P. K. [1 ]
机构：
[1] Missouri State Univ, Dept Phys Astron & Mat Sci, Springfield, MO 65897 USA
[2] Missouri State Univ, Roy Blunt Jordan Valley Innovat Ctr, Springfield, MO 65806 USA
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2008年 / 41卷 / 21期
关键词：
D O I：
10.1088/0022-3727/41/21/215309
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Multilayer thin films of zinc oxide and tungsten-doped indium oxide are deposited by the pulsed laser deposition technique using a KrF excimer laser. The effect of growth temperature on the properties of multilayer films is studied. It is observed that these films are highly transparent and the transparency of the films increases with growth temperature. X-ray diffraction study reveals that films grown at high growth temperature are crystalline, while films grown at low growth temperature are amorphous in nature. The electrical properties such as conductivity and electron mobility of the multilayer films increase with growth temperature.
引用
收藏
页数：5
相关论文
共 50 条
  • [41] Structural and optical properties of ZnO thin films deposited by electron beam evaporation with different annealing temperatures
    Shen, Hua
    Xu, Linhua
    Zheng, Gaige
    Su, Jing
    Zhu, Rihong
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2013, 15 (3-4): : 244 - 248
  • [42] Spectroscopic ellipsometry study of the optoelectrical properties of In2O3:Sn-ZnO:Al thin films deposited through alternating sputtering
    Lin, Keh-moh
    Wu, Sin-Wei
    Li, Liang-Yan
    Sawada, Yutaka
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2016, 124 (05) : 528 - 531
  • [43] Structures and properties of ZnO/SnO2-cosubstituted In2O3 films
    Zhang, M.
    Xie, S. J.
    Buchholz, D. B.
    Chang, R. P. H.
    TMS 2008 ANNUAL MEETING SUPPLEMENTAL PROCEEDINGS, VOL 1: MATERIALS PROCESSING AND PROPERTIES, 2008, : 245 - +
  • [44] Temperature-dependent growth mode of W-doped ZnO nanostructures
    Ngom, B. D.
    Chaker, M.
    Manyala, N.
    Lo, B.
    Maaza, M.
    Beye, A. C.
    APPLIED SURFACE SCIENCE, 2011, 257 (14) : 6226 - 6232
  • [45] Optical properties of Al-doped ZnO thin films deposited by two different sputtering methods
    Yim, Keunbin
    Lee, Chongmu
    CRYSTAL RESEARCH AND TECHNOLOGY, 2006, 41 (12) : 1198 - 1202
  • [46] Properties of antimony doped ZnO thin films deposited by spray pyrolysis technique
    Kumar, N. Sadananda
    Bangera, Kasturi V.
    Shivakumar, G. K.
    SEMICONDUCTORS, 2015, 49 (07) : 899 - 904
  • [47] Properties of antimony doped ZnO thin films deposited by spray pyrolysis technique
    N. Sadananda Kumar
    Kasturi V. Bangera
    G. K. Shivakumar
    Semiconductors, 2015, 49 : 899 - 904
  • [48] Effects of ZnO composition on structure, optical and electrical properties of cosputtering In2O3–Ga2O3–ZnO films
    Yih-Shing Lee
    Chih-Wei Wang
    Yuan-Zhe Lin
    Cheng-Chung Jaing
    Journal of Materials Science: Materials in Electronics, 2016, 27 : 11470 - 11477
  • [49] High electron mobility W-doped In2O3 thin films by pulsed laser deposition -: art. no. 112108
    Newhouse, PF
    Park, CH
    Keszler, DA
    Tate, J
    Nyholm, PS
    APPLIED PHYSICS LETTERS, 2005, 87 (11)
  • [50] Chemically deposited ZnO thin films at relatively high temperatures
    Onal, Metehan
    Altiokka, Baris
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2023, 25 (1-2): : 83 - 88
12345