Surface micromachined Fabry-Perot tunable filter

被引：97
|
作者：
Tran, ATTD [1 ]
Lo, YH [1 ]
Zhu, ZH [1 ]
Haronian, D [1 ]
Mozdy, E [1 ]
机构：
[1] CORNELL UNIV, SCH ELECT ENGN, ITHACA, NY 14853 USA
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 1996年 / 8卷 / 03期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1109/68.481128
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report the fabrication of a wavelength tunable optical filter using surface micromachining technology. The center wavelength is 1.517 mu m and the transmission bandwidth is 5 nm. The device with a 50-mu m diameter aperture has an optical loss of about 5 dB. A continuous wavelength tuning of 60 nm has been demonstrated. This device may find applications in optical sensing and wavelength division multiplexing systems, and can be readily integrated with surface emitting lasers, modulators, and detectors.
引用
收藏
页码：393 / 395
页数：3
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