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Bulk-micromachined tunable Fabry-Perot microinterferometer for the visible spectral range

被引：0
|
作者：
Correia, JH [1 ]
Bartek, M [1 ]
Wolffenbuttel, RF [1 ]
机构：
[1] Delft Univ Technol, Lab Elect Instrumentat, DIMES, NL-2628 CD Delft, Netherlands
来源：
EUROSENSORS XII, VOLS 1 AND 2 | 1998年
关键词：
D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry-Perot MicroInterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low-tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 mu m. One of the mirrors is fixed, the other is under tension on a movable Si frame, wh ch is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mir-ors, low control voltages (<21 V for 450 nm deflection) and simple fabrication.
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页码：287 / 290
页数：4
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