Equipment Comparison Analysis using ANOVA of FDC Statistics

被引：0
|
作者：
Shinozaki, Hidetoshi [1 ]
Nakao, Yoshiyuki [1 ]
机构：
[1] Mie Fujitsu Semicond Ltd, 2000 Mizono, Kuwana, Mie, Japan
来源：
2018 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM) | 2018年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In case of specific equipment in fleet has a problem, we applied ANOVA (Analysis of Variance) of FDC (Fault Detection and Classification) statistics data to extract the problem related sensors. And using the statistics trend and link analysis with various process data we successfully reached root cause of the problem. In this paper we demonstrate how to solve the problem that frequent stage heater disconnection in a Metal-CVD equipment.
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页数：2
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