Equipment Comparison Analysis using ANOVA of FDC Statistics

被引：0
|
作者：
Shinozaki, Hidetoshi [1 ]
Nakao, Yoshiyuki [1 ]
机构：
[1] Mie Fujitsu Semicond Ltd, 2000 Mizono, Kuwana, Mie, Japan
来源：
2018 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM) | 2018年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In case of specific equipment in fleet has a problem, we applied ANOVA (Analysis of Variance) of FDC (Fault Detection and Classification) statistics data to extract the problem related sensors. And using the statistics trend and link analysis with various process data we successfully reached root cause of the problem. In this paper we demonstrate how to solve the problem that frequent stage heater disconnection in a Metal-CVD equipment.
引用
收藏
页数：2
相关论文
共 50 条
  • [21] Analysis with applied statistics of the safety use of rope rescue equipment
    Jackovics, Peter
    INTERNATIONAL JOURNAL OF OCCUPATIONAL SAFETY AND ERGONOMICS, 2020, 26 (04) : 762 - 771
  • [22] Comparison of Analog Transactions using Statistics
    Rath, Alexander W.
    Esen, Volkan
    Ecker, Wolfgang
    INTERNATIONAL SYMPOSIUM ON SYSTEM-ON-CHIP (SOC), 2013,
  • [23] Comparison of the efficacy, safety, and tolerability of the FDC of telmisartan
    Wander, Gurpreet S.
    Ram, Bhim
    Sonkar, Satyendra Kumar
    Manjunath, C. N.
    Kamath, Padmanabh
    Sreenivasamurthy, L.
    Balamurugan, R.
    Rao, S. S. V. V. Narasinga
    Roy, Debabrata
    Bachubhai, Prajapati Vipulkumar
    Manjula, S.
    Kumar, M. Krishna
    INDIAN HEART JOURNAL, 2024, 76 (03) : 159 - 166
  • [24] COMPARISON AND ANALYSIS OF PIPELINE FAILURE STATISTICS
    Cunha, Sergio B.
    PROCEEDINGS OF THE 9TH INTERNATIONAL PIPELINE CONFERENCE - 2012, VOL 4, 2013, : 521 - 530
  • [25] ANALYSIS OF VARIANCE (ANOVA)
    STAHLE, L
    WOLD, S
    CHEMOMETRICS AND INTELLIGENT LABORATORY SYSTEMS, 1989, 6 (04) : 259 - 272
  • [26] Simple Numbers: ANOVA Example of Facilitating Student Learning in Statistics
    Lesser, Larry
    Melgoza, Lorraine
    TEACHING STATISTICS, 2007, 29 (03) : 102 - 105
  • [27] Detection of Artefacts in Czech Synthetic Speech Based on ANOVA Statistics
    Pribil, Jiri
    Pribilova, Anna
    Matousek, Jindrich
    2015 38TH INTERNATIONAL CONFERENCE ON TELECOMMUNICATIONS AND SIGNAL PROCESSING (TSP), 2015,
  • [28] Hoeffding-ANOVA decompositions for symmetric statistics of exchangeable observations
    Peccati, G
    ANNALS OF PROBABILITY, 2004, 32 (3A): : 1796 - 1829
  • [29] Failure analysis of jaw crusher and its components using ANOVA
    R. S. Sinha
    A. K. Mukhopadhyay
    Journal of the Brazilian Society of Mechanical Sciences and Engineering, 2016, 38 : 665 - 678
  • [30] Examining the impact of social media advertising using ANOVA analysis
    Meena Zenith, N.
    Radhika, R.
    CONCURRENCY AND COMPUTATION-PRACTICE & EXPERIENCE, 2024, 36 (05):
12345