Novel TiAlCN/VCN nanoscale multilayer PVD coatings deposited by the combined high-power impulse magnetron sputtering/unbalanced magnetron sputtering (HIPIMS/UBM) technology

被引:52
|
作者
Hovsepian, P. Eh. [1 ]
Ehiasarian, A. P. [1 ]
Deeming, A. [2 ]
Schimpf, C. [3 ]
机构
[1] Sheffield Hallam Univ, Mat & Engn Res Inst, Nanotechnol Ctr PVD Res, Sheffield S1 1WB, S Yorkshire, England
[2] Hydra Clarkson Int, Sheffield S6 3AH, S Yorkshire, England
[3] Tech Univ Min & Technol, Fac Mat Sci & Mat Technol, Freiberg, Germany
关键词
magnetron sputtering; nanoscale multilayer structure; aluminium alloys; dry machining;
D O I
10.1016/j.vacuum.2008.03.064
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new TiAlCN/VCN coating combining high hardness, low friction coefficient and chemical inertness has been developed for dry machining of "Sticky" (Al-, Ti- and Ni-based) alloys as well as advanced Metal-Matrix-Composite (MMC) materials used in aerospace and automotive industries. Excellent performance was achieved due to the synergy between V and C as main coating elements and the nanoscale multilayer structure of the coating. TiAlCN/VCN was deposited by the combined High-Power Impulse Magnetron Sputtering/Unbalanced Magnetron sputtering (HIPIMS/UBM) technology. Macroparticle free V+ ion flux generated by HIPIMS discharge was used to sputter clean the substrates prior to the coating deposition. A 0.4 mu m thick TiAlN base layer followed by 3 mu m thick TiAlCN/VCN nanoscale multilayer coating was deposited by unbalanced magnetron sputtering. The sputtering was carried out in a mixed CH4, N-2 and At atmosphere. In dry milling of Al7010-T7651 alloy, TiAlCN/VCN nanoscale multilayer PVD coating outperformed state of the art Diamond Like Carbon (DLC, Cr/WC/a-CH) coating by factor of 4. In drilling Al-alloy enforced MMC materials, cemented carbide drills coated with TiAlCN/VCN produced 130 holes compared to 1-2 holes with uncoated drills. (c) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1312 / 1317
页数:6
相关论文
共 50 条
  • [1] CrAlYCN/CrCN nanoscale multilayer PVD coatings deposited by the combined High Power Impulse Magnetron Sputtering/Unbalanced Magnetron Sputtering (HIPIMS/UBM) technology
    Hovsepian, P. Eh.
    Ehiasarian, A. P.
    Ratayski, U.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2009, 203 (09): : 1237 - 1243
  • [2] Properties of TiAlCN/VCN Nanoscale Multilayer Coatings Deposited by Mixed High-Power Impulse Magnetron Sputtering (HiPIMS) and Unbalanced Magnetron Sputtering Processes-Impact of HiPIMS During Coating
    Kamath, G.
    Ehiasarian, A. P.
    Hovsepian, P. Eh.
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 2010, 38 (11) : 3062 - 3070
  • [3] VmeCN Based Nanoscale Multilayer PVD Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering/Unbalanced Magnetron Sputtering Technology
    Hovsepian, Papken Eh.
    Ehiasarian, Arutiun P.
    Deeming, Anthony
    Schimpf, Christian
    [J]. PLASMA PROCESSES AND POLYMERS, 2007, 4 : S897 - S901
  • [4] TiAlCN/VCN nanolayer coatings suitable for machining of Al and Ti alloys deposited by combined high power impulse magnetron sputtering/unbalanced magnetron sputtering
    Hovsepian, P. E.
    Ehiasarian, A. P.
    Petrov, I.
    [J]. SURFACE ENGINEERING, 2010, 26 (08) : 610 - 614
  • [5] Oxidation Behaviour of Nanoscale Multilayer CrAlYN/CrN Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering/Unbalanced Magnetron Sputtering Technique
    Reinhard, Christina
    Ehiasarian, Arutiun P.
    Hovsepian, Papken Eh
    [J]. PLASMA PROCESSES AND POLYMERS, 2007, 4 : S910 - S915
  • [6] Novel CrAlYN/CrN nanoscale multilayer PVD coatings produced by the combined High Power Impulse Magnetron Sputtering/Unbalanced Magnetron Sputtering technique for environmental protection of γ-TiAl alloys
    Hovsepian, P. Eh.
    Ehiasarian, A. P.
    Braun, R.
    Walker, J.
    Du, H.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2010, 204 (16-17): : 2702 - 2708
  • [7] CrAlYN/CrN superlattice coatings deposited by the combined high power impulse magnetron sputtering/unbalanced magnetron sputtering technique
    Hovsepian, P. Eh.
    Reinhard, C.
    Ehiasarian, A. P.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07): : 4105 - 4110
  • [8] Deposition of 3YSZ-TiC PVD Coatings with High-Power Impulse Magnetron Sputtering (HiPIMS)
    Gaedike, Bastian
    Guth, Svenja
    Kern, Frank
    Killinger, Andreas
    Gadow, Rainer
    [J]. APPLIED SCIENCES-BASEL, 2021, 11 (06):
  • [9] Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering(HiPIMS) and Pulsed DC Magnetron Sputtering
    Tie-Gang Wang
    Yu Dong
    Belachew Abera Gebrekidan
    Yan-Mei Liu
    Qi-Xiang Fan
    Kwang Ho Kim
    [J]. Acta Metallurgica Sinica(English Letters), 2017, 30 (07) : 688 - 696
  • [10] Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering (HiPIMS) and Pulsed DC Magnetron Sputtering
    Tie-Gang Wang
    Yu Dong
    Belachew Abera Gebrekidan
    Yan-Mei Liu
    Qi-Xiang Fan
    Kwang Ho Kim
    [J]. Acta Metallurgica Sinica (English Letters), 2017, 30 : 688 - 696