Novel TiAlCN/VCN nanoscale multilayer PVD coatings deposited by the combined high-power impulse magnetron sputtering/unbalanced magnetron sputtering (HIPIMS/UBM) technology

被引:52
|
作者
Hovsepian, P. Eh. [1 ]
Ehiasarian, A. P. [1 ]
Deeming, A. [2 ]
Schimpf, C. [3 ]
机构
[1] Sheffield Hallam Univ, Mat & Engn Res Inst, Nanotechnol Ctr PVD Res, Sheffield S1 1WB, S Yorkshire, England
[2] Hydra Clarkson Int, Sheffield S6 3AH, S Yorkshire, England
[3] Tech Univ Min & Technol, Fac Mat Sci & Mat Technol, Freiberg, Germany
关键词
magnetron sputtering; nanoscale multilayer structure; aluminium alloys; dry machining;
D O I
10.1016/j.vacuum.2008.03.064
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new TiAlCN/VCN coating combining high hardness, low friction coefficient and chemical inertness has been developed for dry machining of "Sticky" (Al-, Ti- and Ni-based) alloys as well as advanced Metal-Matrix-Composite (MMC) materials used in aerospace and automotive industries. Excellent performance was achieved due to the synergy between V and C as main coating elements and the nanoscale multilayer structure of the coating. TiAlCN/VCN was deposited by the combined High-Power Impulse Magnetron Sputtering/Unbalanced Magnetron sputtering (HIPIMS/UBM) technology. Macroparticle free V+ ion flux generated by HIPIMS discharge was used to sputter clean the substrates prior to the coating deposition. A 0.4 mu m thick TiAlN base layer followed by 3 mu m thick TiAlCN/VCN nanoscale multilayer coating was deposited by unbalanced magnetron sputtering. The sputtering was carried out in a mixed CH4, N-2 and At atmosphere. In dry milling of Al7010-T7651 alloy, TiAlCN/VCN nanoscale multilayer PVD coating outperformed state of the art Diamond Like Carbon (DLC, Cr/WC/a-CH) coating by factor of 4. In drilling Al-alloy enforced MMC materials, cemented carbide drills coated with TiAlCN/VCN produced 130 holes compared to 1-2 holes with uncoated drills. (c) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1312 / 1317
页数:6
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