Deposition of 3YSZ-TiC PVD Coatings with High-Power Impulse Magnetron Sputtering (HiPIMS)

被引:4
|
作者
Gaedike, Bastian [1 ]
Guth, Svenja [2 ]
Kern, Frank [2 ]
Killinger, Andreas [2 ]
Gadow, Rainer [2 ]
机构
[1] Hartmetall Werkzeugfabrik Paul Horn GmbH, D-72072 Tubingen, Germany
[2] Univ Stuttgart, Inst Mfg Technol Ceram Components & Composites IF, Allmandring 7b, D-70569 Stuttgart, Germany
来源
APPLIED SCIENCES-BASEL | 2021年 / 11卷 / 06期
关键词
coating characterization; disappearing anode effect; electrically conductive additives; HiPIMS parameters; yttria-stabilized zirconia;
D O I
10.3390/app11062753
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Optimized coating adhesion and strength are the advantages of high-power impulse magnetron sputtering (HiPIMS) as an innovative physical vapor deposition (PVD) process. When depositing electrically non-conductive oxide ceramics as coatings with HiPIMS without dual magnetron sputtering (DMS) or mid-frequency (MF) sputtering, the growing coating leads to increasing electrical insulation of the anode. As a consequence, short circuits occur, and the process breaks down. This phenomenon is also known as the disappearing anode effect. In this study, a new approach involving adding electrically conductive carbide ceramics was tried to prevent the electrical insulation of the anode and thereby guarantee process stability. Yttria-stabilized zirconia (3YSZ) with 30 vol.% titanium carbide (TiC) targets are used in a non-reactive HiPIMS process. The main focus of this study is a parameter inquisition. Different HiPIMS parameters and their impact on the measured current at the substrate table are analyzed. This study shows the successful use of electrically conductive carbide ceramics in a non-conductive oxide as the target material. In addition, we discuss the observed high table currents with a low inert gas mix, where the process was not expected to be stable.
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页数:9
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