Design, modeling and simulation of MEMS pressure sensors

被引：3
|
作者：
Geca, Mateusz [1 ]
Kociubinski, Andrzej [1 ]
机构：
[1] Lublin Univ Technol, PL-20618 Lublin, Poland
来源：
PHOTONICS APPLICATIONS IN ASTRONOMY, COMMUNICATIONS, INDUSTRY, AND HIGH-ENERGY PHYSICS EXPERIMENTS 2013 | 2013年 / 8903卷
关键词：
piezoresistive pressure sensor; MEMS; CoventorWare; optimization; finite element method;
D O I：
10.1117/12.2035439
中图分类号：
P1 [天文学];
学科分类号：
0704 ;
摘要：
This paper focuses on the design and analysis of a MEMS piezoresistive pressure sensor. The absolute pressure sensor with a 150 mu m wide and 3 mu m thick silicon membrane is modeled and simulated using CoventorWare (TM) software-profiting from a finite element method (FEM) implemented to determine specific electro-mechanical parameter values characterizing MEMS structure being designed. Optimization of piezoresistor parameters has been also performed to determine optimum dimensions of piezoresistors and their location referred to the center on the pressure sensor diaphragm. The output voltage measured on a piezoresistive Wheatstone bridge has been obtained and compared for two different resistor materials along with and linearity error analysis.
引用
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页数：10
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