Performance Optimization of a High Frequency CMUT Probe for Medical Imaging

In this work we report on the performance optimization of a recently developed high frequency CMUT probe. By leveraging the advantages offered by our proprietary "Reverse Fabrication Process (RFP)" CMUT technology, we have developed an efficient and reliable packaging process, useful for the fabrication of small sized ultrasound probe-heads. We have maximized the performance by connecting the CMUT probe-head to multichannel analog front-end electronic circuits housed into the probe. An experimental comparison with an equivalent piezoelectric probe, the LA435 commercialized by Esaote S. p. A. (Italy), carried out by means of pulse-echo measurements, showed superior performance for the CMUT probe. Real time in-vivo ultrasound imaging capability demonstrates the actual usability of CMUT technology for medical imaging.