High-frequency CMUT arrays for high-resolution medical imaging

This paper describes high-frequency I-D CMUT arrays designed and fabricated for use in electronically scanned high-resolution ultrasonic imaging systems. Two different designs of 64-element linear CMUT arrays are presented in this paper. A single element in each array is connected to a single-channel custom front-end integrated circuit for pulse-echo operation. The first design has a resonant frequency of 43 MHz in air, and operates at 30 MHz in immersion. The second design exhibits a resonant frequency of 60 MHz in air, and operates at 45 MHz in immersion. The experimental results are compared to simulation results obtained from the equivalent circuit model and nonlinear dynamic finite element analysis; a good agreement is observed between these results. This paper also briefly discusses the effects of the area rill factor on the frequency characteristics of CMUTs, which reveals that the transducer active area should be maximized to obtain a wideband response at high frequencies.