Batch fabrication technique of NdFeB for MEMS based electromagnetic energy harvester

被引：0
|
作者：
Fujita, Takayuki [1 ,2 ]
Miki, Shogo [1 ]
Kotoge, Tatsuya [1 ]
Uehara, Minoru [3 ]
Kanda, Kensuke [1 ,2 ]
Higuchi, Kohei [2 ]
Maenaka, Kazusuke [1 ,2 ]
机构：
[1] Univ Hyogo, Grad Sch Engn, Himeji, Hyogo 6712280, Japan
[2] Maenaka Human Sensing Fusion, BST ERATO, Himeji 6712280, Japan
[3] NEOMAX Co Ltd, Magnet Mat Res Lab, Osaka 6180013, Japan
来源：
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 | 2012年 / 47卷
关键词：
Megnetic material; NdFeB; Sputtering; Energy harvesting;
D O I：
10.1016/j.proeng.2012.09.228
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study presents a wafer-level batch fabrication technique of NdFeB film for MEMS (Micro Electromechanical Systems) based electromagnetic type energy harvester. By using 20 mu m thickness NdFeB sputtered magnetic film on a trench-etched Si microstructure, fine patterned magnet structures for energy harvester had been realized. However the size of the sputtered sample was limited to the slightly small size. In this study, we improve the sputtering equipment to apply the NdFeB film process on a four-inch Si wafer. The film characteristics, estimation of the compatibility with the MEMS process and also energy harvesting result are presented. (C) 2012 Elsevier Ltd....Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.
引用
收藏
页码：639 / 642
页数：4
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