A MEMS Electromagnetic Energy Harvester using Ultrasonic Excitation

被引：0
|
作者：
Fowler, Anthony G. [1 ]
Moheimani, S. O. Reza [1 ]
Behrens, Sam
机构：
[1] Univ Newcastle, Sch Elect Engn & Comp Sci, Callaghan, NSW 2308, Australia
来源：
2013 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM): MECHATRONICS FOR HUMAN WELLBEING | 2013年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Energy harvesting remains a significant area of interest in current microelectromechanical systems (MEMS) research, with integrated microscale harvesters potentially being able to increase the running time of a range of electronic systems. This paper presents the design and characterization of an electromagnetic MEMS energy harvester that uses ultrasonic waves for mechanical excitation. A potential application for this concept is the charging of implanted biomedical devices via such micro-sized harvesters. The fabricated device is experimentally tested and characterized, with 0.06 n W of electrical power being generated at the device's first resonance frequency of 41.3 kHz.
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页码：330 / 334
页数：5
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