Review of MEMS Electromagnetic Vibration Energy Harvester

This paper mainly introduces the research progress of MEMS electromagnetic vibration energy harvester, hoping to provide valuable guidance and reference for researchers in related fields. In this paper, recent studies are divided into three groups according to their objectives and approaches: reducing the resonant frequency of the harvester to collect low frequency vibration energy from the environment; broadening the bandwidth of the harvester to increase the utilization of the random vibration energy; and developing new process compatible with MEMS for mass production. Besides, maintaining valuable output performances, such as power and power density, is also an important concern in these studies. Limited to the current technology, it is impossible to make a perfect harvester with low resonant frequency, wide frequency band, good compatibility with MEMS, and good output performances at the same time. However, we can focus on one or two characteristics according to the application, to which this paper provides valuable reference. More works on simulation, new process, and detailed design of the components are required in MEMS electromagnetic vibration energy harvesters.