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- [23] Energy loss mechanisms in a bulk-micromachined tuning fork gyroscope 2006 IEEE SENSORS, VOLS 1-3, 2006, : 1333 - +
- [28] A Bulk-Micromachined Fully-Differential MEMS Accelerometer with Interdigitated Fingers 2012 IEEE SENSORS PROCEEDINGS, 2012, : 158 - 161
- [30] A bulk-micromachined single crystal silicon gyroscope operating at atmospheric pressure TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 476 - 479