Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters

被引：0
|
作者：
Wang, XB [1 ]
Qian, J
Zhang, DC
机构：
[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
[2] Chinese Acad Sci, Inst Mech, LNM, Beijing 100080, Peoples R China
来源：
ACTA MECHANICA SINICA | 2004年 / 20卷 / 02期
关键词：
micromachined flowmeters; bulk-micromachining; piezoresistivity; Wheatstone bridge;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5kOmega. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.
引用
收藏
页码：152 / 158
页数：7
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