Characterization of electroplated, thick permalloy films

被引：4
|
作者：
Getlawi, S. [1 ]
Theis, M. [2 ]
Friedrich, S.
Koblischka-Veneva, A. [3 ]
Koblischka, M. R. [1 ]
Saumer, M. [2 ]
Hartmann, U. [1 ]
机构：
[1] Univ Saarland, Inst Expt Phys, D-66041 Saarbrucken, Germany
[2] Univ Appl Sci Kaiserslautern, Dept Microsyst Technol, D-66482 Zweibrucken, Germany
[3] Univ Saarland, Inst Funct Mat, D-66041 Saarbrucken, Germany
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2008年 / 205卷 / 08期
关键词：
D O I：
10.1002/pssa.200723621
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Permalloy (Ni81Fe19) films and foils were fabricated by means of electroplating. Two different types of samples were produced, (i) a patterned permalloy film on a Si wafer (type 1) and (ii) a NiFe foil (type 2), which was separated from the substrate after deposition. The samples were characterized employing magnetic force microscopy (MFM), transmission electron microscopy (TEM) and electron-backscatter diffraction (EBSD). On the foil type sample, MFM reveals a maze domain pattern, and on the structured samples (type 1), a Landau domain pattern is obtained. EBSD enables the identification of the permalloy Kikuchi pattern without the effect of a substrate. The analysis reveals randomly oriented grains with a narrow size distribution. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：1809 / 1812
页数：4
相关论文
共 50 条
  • [31] Self-annealing characterization of electroplated copper films
    Lagrange, S
    Brongersma, SH
    Judelewicz, M
    Saerens, A
    Vervoort, I
    Richard, E
    Palmans, R
    Maex, K
    MICROELECTRONIC ENGINEERING, 2000, 50 (1-4) : 449 - 457
  • [32] Microstructure and Magnetic Properties of Electroplated Ni-Fe Permalloy Thin Films by Saccharin Concentration in Electrolytes
    Lee, Hojun
    Bang, Wonbae
    Hong, Kimin
    Ko, Young-Dong
    Chung, Jin-Seok
    Lee, Heebok
    JOURNAL OF THE KOREAN MAGNETICS SOCIETY, 2009, 19 (04): : 138 - 141
  • [33] Planarity improvement and reduction of coercivity by organic additives in electroplated ni-fe permalloy thin films
    Bang, Wonbae
    Hong, Kimin
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2007, 10 (08) : J86 - J88
  • [34] Epitaxial growth and characterization of (100) and (110) permalloy films
    Huang, JCA
    Wang, TE
    Yu, CC
    Hu, YM
    Lee, PB
    Yang, MS
    JOURNAL OF CRYSTAL GROWTH, 1997, 171 (3-4) : 442 - 446
  • [35] Growth and Characterization of Electroplated Copper Selenide Thin Films
    Ramesh, K.
    Bharathi, B.
    Thanikaikarasan, S.
    Mahalingam, T.
    Sebastian, P. J.
    JOURNAL OF NEW MATERIALS FOR ELECTROCHEMICAL SYSTEMS, 2013, 16 (02) : 127 - 132
  • [36] Effect of Magnetic Field on Permeability of Electroplated Permalloy for Microdevices
    Kubo, Eitaro
    Ooi, Naoki
    Aoki, Hidemitsu
    Watanabe, Daisuke
    Jeong, Jong-Hyeon
    Kimura, Chiharu
    Sugino, Takashi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (04)
  • [37] Analysis of the Performance of a Micromechanical Test Structure to Measure Stress in Thick Electroplated Metal Films
    Smith, S.
    Brockie, N. L.
    Murray, J.
    Wilson, C. J.
    Horsfall, A. B.
    Terry, J. G.
    Stevenson, J. T. M.
    Mount, A. R.
    Walton, A. J.
    2010 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, 23RD IEEE ICMTS CONFERENCE PROCEEDINGS, 2010, : 80 - 85
  • [38] MAGNETIC PROPERTIES AND INTERNAL STRESSES OF THICK VAPOR-DEPOSITED PERMALLOY-FILMS
    ROGALLA, D
    RUH, WD
    IEEE TRANSACTIONS ON MAGNETICS, 1973, MAG9 (03) : 571 - 574
  • [39] Influence of temperature on the magnetic properties of electroplated L10 CoPt thick films
    Garraud, Alexandra
    Oniku, Ololade D.
    Arnold, David P.
    JOURNAL OF APPLIED PHYSICS, 2015, 117 (17)
  • [40] Development of surface micromachined magnetic actuators using electroplated permalloy
    Liu, C
    MECHATRONICS, 1998, 8 (05) : 613 - 633
12345