Temperature controlled microstage for an atomic force microscope

被引：41
|
作者：
Musevic, I
Slak, G
Blinc, R
机构：
[1] J. Stefan Institute, 61 000 Ljubljana
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1996年 / 67卷 / 07期
关键词：
D O I：
10.1063/1.1147212
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A temperature controlled microstage has been developed for an atomic force microscope (AFM). The stage is based on a small, temperature regulated heater, which is attached to the piezo-scanner of the AFM. The operating performances of the AFM have been tested in air at elevated temperatures. It was found that atomic resolution can routinely be achieved up to 80 degrees C, whereas beyond this temperature, the onset of thermal instabilities of the AFM cantilever was observed. (C) 1996 American Institute of Physics.
引用
收藏
页码：2554 / 2556
页数：3
相关论文
共 50 条
  • [31] Adaptive Atomic Force Microscope
    Schmidt, Patrick D.
    Reichert, Benjamin H.
    Lajoie, John G.
    Sivasankar, Sanjeevi
    SINGLE MOLECULE SPECTROSCOPY AND SUPERRESOLUTION IMAGING XIII, 2020, 11246
  • [32] THE ATOMIC FORCE MICROSCOPE AND FO
    RODGERS, M
    PHOTONICS SPECTRA, 1991, 25 (01) : 98 - &
  • [33] Moire in atomic force microscope
    Chen, H
    Liu, D
    Lee, A
    EXPERIMENTAL TECHNIQUES, 2000, 24 (01) : 31 - 32
  • [34] Optomechanical atomic force microscope
    He, Fei
    Liu, Jian
    Zhu, Ka-Di
    NANOTECHNOLOGY, 2021, 32 (08)
  • [35] Nanolithography with an atomic force microscope
    Wendel, M
    Irmer, B
    Cortes, J
    Kaiser, R
    Lorenz, H
    Kotthaus, JP
    Lorke, A
    Williams, E
    SUPERLATTICES AND MICROSTRUCTURES, 1996, 20 (03) : 349 - 356
  • [36] APPLICATIONS OF THE ATOMIC FORCE MICROSCOPE
    MEYER, E
    GRUTTER, P
    HEINZELMANN, H
    ROSENTHALER, L
    HIDBER, HR
    GUNTHERODT, HJ
    HELVETICA PHYSICA ACTA, 1988, 61 (1-2): : 179 - 179
  • [37] Moiré in atomic force microscope
    H. Chen
    D. Liu
    A. Lee
    Experimental Techniques, 2000, 24 : 31 - 32
  • [38] A variable-temperature nanostencil compatible with a low-temperature scanning tunneling microscope/atomic force microscope
    Steurer, Wolfram
    Gross, Leo
    Schlittler, Reto R.
    Meyer, Gerhard
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (02):
  • [39] Channel temperature measurement of GaAs devices using an atomic force microscope
    Anderson, WT
    Mittereder, JA
    Roussos, JA
    1999 GAAS RELIABILITY WORKSHOP, PROCEEDINGS, 1999, : 3 - 9
  • [40] Study of overlay metrology in atomic force microscope lithography (overlaying lithography with atomic force microscope)
    Li, Xiaona
    Han, Li
    Gu, Wenqi
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (06): : 3101 - 3104
12345