Temperature controlled microstage for an atomic force microscope

A temperature controlled microstage has been developed for an atomic force microscope (AFM). The stage is based on a small, temperature regulated heater, which is attached to the piezo-scanner of the AFM. The operating performances of the AFM have been tested in air at elevated temperatures. It was found that atomic resolution can routinely be achieved up to 80 degrees C, whereas beyond this temperature, the onset of thermal instabilities of the AFM cantilever was observed. (C) 1996 American Institute of Physics.