Analytical electron microscopy interface layers between Ti(6% Al, 4% V) and a CrN cathodic arc coating

This paper reports on the applications of analytical electron microscopy to the study of cathodic arc deposited CrN coating on a Ti(6% Al, 4% V) substrate. Particular attention is given to analysis of the coating/substrate interface. Electron energy loss spectroscopy is used to show that the Cr sputter cleaning of the Ti(6% Al, 4% V) results in penetration of Cr into the substrate giving a bcc alloy layer whose composition varies from Ti(6% Al, 4% V) at the substrate interface to almost pure Cr at the coating interface. Subsequent deposition of CrN results in an initial deposition of sub-stoichiometric Cr2N followed by sub-stoichiometric CrN with a {022} texture and a columnar structure. The degree of sub-stoichiometry of the nitrides depends on the substrate bias and the substrate orientation relative to the cathode.