共 50 条
- [1] Extreme ultraviolet spectroscopy of a laser plasma source for lithography APPLICATIONS OF X RAYS GENERATED FROM LASERS AND OTHER BRIGHT SOURCES, 1997, 3157 : 236 - 240
- [2] Extreme ultraviolet spectroscopy of a laser plasma source for lithography PHYSICA SCRIPTA, 1998, 57 (02): : 276 - 282
- [4] LASER TECHNIQUES FOR EXTREME ULTRAVIOLET SPECTROSCOPY LASER FOCUS WITH FIBEROPTIC TECHNOLOGY, 1982, 18 (06): : 16 - &
- [7] Absorption spectroscopy of an expanding laser produced lithium plasma in the extreme ultraviolet using the dual laser plasma technique Applied Surface Science, 1998, 127-129 : 686 - 691
- [10] PLASMA LASER AS RADIATION SOURCE FOR EXTREME ULTRAVIOLET SPECTROMETRY REVUE INTERNATIONALE DES HAUTES TEMPERATURES ET DES REFRACTAIRES, 1971, 8 (01): : 89 - &