共 50 条
- [21] Modeling and optimization of debris mitigation systems for laser and discharge-produced plasma in extreme ultraviolet lithography devices JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2007, 6 (04):
- [24] Optimum Laser-Produced Plasma for Extreme Ultraviolet Light Source 5TH INTERNATIONAL CONFERENCE ON INERTIAL FUSION SCIENCES AND APPLICATIONS (IFSA2007), 2008, 112
- [25] Extreme ultraviolet source using laser-produced Li plasma IEEJ Trans. Electron. Inf. Syst., 2009, 2 (249-252+7): : 249 - 252
- [27] Xe capillary target for laser-plasma extreme ultraviolet source REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (10):
- [28] NEW LASER-PLASMA SOURCE FOR EXTREME-ULTRAVIOLET LITHOGRAPHY APPLIED OPTICS, 1995, 34 (25): : 5750 - 5760
- [29] Development of laser-produced plasma sources for extreme ultraviolet lithography JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2012, 11 (02):
- [30] EXTREME ULTRAVIOLET RESIST AND MIRROR CHARACTERIZATION - STUDIES WITH A LASER PLASMA SOURCE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1643 - 1647