共 50 条
- [36] Square-extensional mode single-crystal silicon micromechanical RF-resonator BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 951 - 954
- [39] Topology optimization in micromechanical resonator design Optimization and Engineering, 2012, 13 : 271 - 292