Hot Embossing of Microoptical Components Prototyped by Deep Proton Writing

被引：30

作者：

Van Erps, Juergen ^{[1
]}

Wissmann, Markus ^{[2
]}

Guttmann, Markus ^{[2
]}

Hartmann, Michael ^{[2
]}

Mohr, Juergen ^{[2
]}

Debaes, Christof ^{[1
]}

Thienpont, Hugo ^{[1
]}

机构：

[1] Vrije Univ Brussel, Dept Appl Phys & Photon, B-1050 Brussels, Belgium

[2] IMT, D-76344 Eggenstein Leopoldshafen, Germany

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2008年 / 20卷 / 17-20期

关键词：

Coupling components; deep proton writing (DPW); hot embossing; mass fabrication; plastics; replication;

D O I：

10.1109/LPT.2008.928836

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this letter, we present the replication of out-of-plane coupling microcomponents using hot embossing, through the fabrication of a metal mould by electroforming a polymer template patterned by means of deep proton writing (DPW). We compare the surface roughness and the optical performance of the hot embossed replicas with the DPW prototypes and can conclude that the replicated components exhibit only a small increase in surface roughness and a very small decrease in coupling performance. This paves the way towards low-cost mass replication of DPW-fabricated prototypes in a variety of high-tech plastics.

引用

页码：1539 / 1541

页数：3

共 33 条

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