Hot embossing and injection molding for microoptical components

被引：5
|
作者：
Heckele, M
Bacher, W
Hanemann, T
Ulrich, H
机构：
来源：
PRECISION PLASTIC OPTICS FOR OPTICAL STORAGE, DISPLAYS, IMAGING, AND COMMUNICATIONS | 1997年 / 3135卷
关键词：
plastic molding; microoptics; hot embossing; injection molding; microspectrometer;
D O I：
10.1117/12.284110
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
After the successful development of microoptical components today the first commercial applications are arising. This induces the necessity of adapted production technologies. Hot embossing and injection molding are two techniques to fabricate microoptical components characterized by lateral structure details below 1 mu m, structure heights up to one millimeter and aspect ratios between 20 and 100. Injection molding is famous for its short cycle times which makes this method well suited for mass production. Very delicate microstructures and multilayer components can be fabricated e.g. within the framework of the LIGA-process by hot embossing. Examples for microoptical components fabricated by molding as well as process equipment will be discussed.
引用
收藏
页码：24 / 29
页数：6
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