共 50 条
- [41] Chemical vapor deposition of conformal alumina thin films CHEMICAL PROCESSING OF DIELECTRICS, INSULATORS AND ELECTRONIC CERAMICS, 2000, 606 : 75 - 80
- [42] Chemical vapor deposition of conformal alumina thin films Materials Research Society Symposium - Proceedings, 2000, 606 : 75 - 80
- [46] Metalorganic chemical vapor deposition of SrxTiyOz thin films by using mixed metal precursorsOz thin films by using mixed metal precursors Korean Journal of Chemical Engineering, 2006, 23 : 153 - 158
- [48] SYNCHROTRON RADIATION-INDUCED CHEMICAL VAPOR-DEPOSITION OF THIN-FILMS FROM METAL HEXACARBONYLS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1804 - 1807
- [49] Cobalt thin films prepared by chemical vapor deposition from cobalt acetylacetonates JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1997, 36 (6A): : L705 - L707