The chemical vapor deposition of metal boride thin films from polyhedral cluster species.

被引:0
|
作者
Glass, JA
Kher, SS
Tan, YX
Spencer, JT
机构
[1] SYRACUSE UNIV,DEPT CHEM,SYRACUSE,NY 13244
[2] SYRACUSE UNIV,WM KECK CTR MOL ELECT,SYRACUSE,NY 13244
来源
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1997年 / 214卷
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D O I
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中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
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页码:51 / IEC
页数:1
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