Towards 3D optical integration by micro-transfer printing of ultra-thin membrane devices

Transfer printing is a micro-assembly technique that has been used to demonstrate hybrid material device integration using membranes, typically of a few microns in thickness. In order to target full 3D integration of integrated photonic devices, here we present the fabrication and printing of membranes with dimensions down to 10's of nanometres. Both sacrificial layer etching and assembly of free standing platelets onto support substrates have been developed to allow membrane formation across a range of material platforms. Devices are successfully printed onto host substrates, showing a high degree of mechanical flexibility and conformation over existing surface features. Multi-layer printing of membranes shows a route towards micro-assembly of hybrid material 3D photonics.