[1] Taiyuan Univ Technol, Key Lab Adv Transducers & Intelligent Control Sys, Minist Educ, Taiyuan 030024, Peoples R China
[2] Taiyuan Univ Technol, Key Lab Interface Sci & Engn Adv Mat, Minist Educ, Taiyuan 030024, Peoples R China
[3] Shaanxi Univ Sci & Technol, Mat Inst Atom & Mol Sci, Xian 710021, Peoples R China
[4] UESTC, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China