Static and dynamic characteristics of angular velocity and acceleration transducers based on optical tunneling effect

被引:1
|
作者
Busurin, V. I. [1 ]
Korobkov, V. V. [1 ]
Lwin, Naing Htoo [1 ]
Phan Anh Tuan [1 ]
机构
[1] Natl Res Univ, Moscow Aviat Inst, Volokolamskoe Rd 4,A-80,GPS-3, Moscow 125993, Russia
关键词
D O I
10.1088/1742-6596/737/1/012045
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Theoretical and experimental analysis of quasi-linear conversion function of angular velocity and acceleration microoptoelectromechnical (MOEM) transducers based on optical tunneling effect (OTE) are conducted. Equivalent oscillating circuit is developed and dynamic characteristics of angular velocity and acceleration MOEM-transducers are investigated.
引用
收藏
页数:7
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