Bridged-Grain Solid-Phase-Crystallized Polycrystalline-Silicon Thin-Film Transistors

被引：32

作者：

Zhou, Wei ^{[1
]}

Meng, Zhiguo ^{[1
]}

Zhao, Shuyun ^{[1
]}

Zhang, Meng ^{[1
]}

Chen, Rongsheng ^{[1
]}

Wong, Man ^{[1
]}

Kwok, Hoi-Sing ^{[1
]}

机构：

[1] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Hong Kong, Peoples R China

来源：

IEEE ELECTRON DEVICE LETTERS | 2012年 / 33卷 / 10期

关键词：

Bridged grain (BG); polycrystalline silicon (poly-Si); thin-film transistors (TFTs); HIGH-PERFORMANCE; PLASMA PASSIVATION; DRAIN; TFTS;

D O I：

10.1109/LED.2012.2210019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Novel bridged-grain (BG) technique is applied in the fabrication of low-temperature solid-phase-crystallized polycrystalline-silicon thin-film transistors. As a result of improved current flow and reduction of high drain electric field, the subthreshold slope, threshold voltage, maximum field-effect mobility, leakage current, and on-off ratio are greatly improved. Mechanisms of BG conduction are studied in detail.

引用

页码：1414 / 1416

页数：3

共 50 条

[1] High uniformity solid phase crystallized bridged-grain polycrystalline silicon thin film transistors
Center for Display Research, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
Dig. Tech. Pap. SID Int. Symp., 2013, 1 (1003-1006):
[2] Bridged-Grain Polycrystalline Silicon Thin-Film Transistors
Zhao, Shuyun
Meng, Zhiguo
Zhou, Wei
Ho, Jacob
Wong, Man
Kwok, Hoi-Sing
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (06) : 1965 - 1970
[3] Low-Frequency Noise in Bridged-Grain Polycrystalline Silicon Thin-Film Transistors
Yang, Yuyang
Zhang, Meng
Lu, Lei
Wong, Man
Kwok, Hoi-Sing
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2022, 69 (04) : 1984 - 1988
[4] Bridged-grain (BG) Polycrystalline Silicon Thin Film Transistors (TFTs)
Kwok, H. S.
Wong, M.
Zhao, S. Y.
Zhou, W.
2011 INTERNATIONAL CONFERENCE ON SEMICONDUCTOR TECHNOLOGY FOR ULTRA LARGE SCALE INTEGRATED CIRCUITS AND THIN FILM TRANSISTORS (ULSIC VS. TFT), 2011, 37 (01): : 23 - 28
[5] Fabrication of bridged-grain polycrystalline silicon thin film transistors by nanoimprint lithography
Zhou, Wei
Ho, Jacob Yeuk Lung
Zhao, Shuyun
Chen, Rongsheng
Wong, Man
Kwok, Hoi-Sing
Thin Solid Films, 2013, 535 (01) : 636 - 639
[6] Fabrication of bridged-grain polycrystalline silicon thin film transistors by nanoimprint lithography
Zhou, Wei
Ho, Jacob Yeuk Lung
Zhao, Shuyun
Chen, Rongsheng
Wong, Man
Kwok, Hoi-Sing
THIN SOLID FILMS, 2013, 534 : 636 - 639
[7] Analysis of the activation energy of the subthreshold current in laser- and solid-phase-crystallized polycrystalline silicon thin-film transistors
Pichon, L
Mercha, A
Carin, R
Bonnaud, O
Mohammed-Brahim, T
Helen, Y
Rogel, R
APPLIED PHYSICS LETTERS, 2000, 77 (04) : 576 - 578
[8] Dynamic-Gate-Stress-Induced Degradation in Bridged-Grain Polycrystalline Silicon Thin-Film Transistors
Zhang, Meng
Xia, Zhihe
Zhou, Wei
Chen, Rongsheng
Wong, Man
Kwok, Hoi-Sing
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2016, 63 (10) : 3964 - 3970
[9] Characterization of DC-Stress-Induced Degradation in Bridged-Grain Polycrystalline Silicon Thin-Film Transistors
Zhang, Meng
Zhou, Wei
Chen, Rongsheng
Wong, Man
Kwok, Hoi-Sing
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2014, 61 (09) : 3206 - 3212
[10] POLYCRYSTALLINE-SILICON THIN-FILM TRANSISTORS ON GLASS
MATSUI, M
SHIRAKI, Y
KATAYAMA, Y
KOBAYASHI, KLI
SHINTANI, A
MARUYAMA, E
APPLIED PHYSICS LETTERS, 1980, 37 (10) : 936 - 937

← 1 2 3 4 5 →