Fixed Beam Moving Stage Electron Beam Lithography of Waveguide Coupling Device Structures

被引：0
|
作者：
Sanabia, Jason E. [1 ]
Burcham, Kevin E. [1 ]
Klingfus, Joseph [1 ]
Piaszenski, Guido [2 ]
Kahl, Michael [2 ]
Jede, Ralf [2 ]
机构：
[1] Raith USA Inc, 2805 Vet Highway,Suite 23, Ronkonkoma, NY 11779 USA
[2] Raith GmbH, D-44263 Dortmund, Germany
来源：
2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2012年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The Fixed Beam Moving Stage (FBMS) lithography mode is used toward the fabrication of waveguide coupling device structures. Scanning electron microscope metrology is used for the dimensional characterization of the resulting waveguide structures.
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页数：2
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