Decrease of Ceramic Surface Resistance by Implantation Using a Vacuum Arc Metal Ion Source

被引：0
|
作者：
Savkin, K. P. [1 ]
Bugaev, A. S. [1 ]
Nikolaev, A. G. [1 ]
Oks, E. M. [1 ]
Kurzina, I. A. [2 ]
Shandrikov, M. V. [1 ]
Yushkov, G. Yu. [1 ]
Brown, I. G. [3 ]
机构：
[1] SB RAS, Inst High Current Elect, 2-3 Akad Skii Ave, Tomsk 634055, Russia
[2] Natl Res Tomsk Polytecn Univ, Tomsk, Russia
[3] Lawrence Berkeley Natl Lab, Berkeley, CA USA
来源：
25TH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM (ISDEIV 2012) | 2012年
关键词：
INSULATORS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The results of metal ion implantation into alumina ceramic are presented. We show that the of ceramic surface resistivity depends on the metal ion spcies used for the implantation, and decreases with increasing metal ion implantation dose, decreasing by 3 - 4 orders of magnitude from 10(12) Ohm/sq. This approach provides an effective tool for bleeding off accumulated surface charge of ceramic components that can result from interaction with charged particles flows or dielectric polarization. The method can be applied for increasing the maximum electric field hold-off of insulating surfaces in high-voltage devices.
引用
收藏
页码：554 / 557
页数：4
相关论文
共 50 条
  • [41] METAL PLASMA IMMERSION ION-IMPLANTATION AND DEPOSITION USING VACUUM-ARC PLASMA SOURCES
    ANDERS, A
    ANDERS, S
    BROWN, IG
    DICKINSON, MR
    MACGILL, RA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 815 - 820
  • [42] Analysis of Surface Properties of Ag and Ti Ion-Treated Medical Textiles by Metal Vapor Vacuum Arc Ion Implantation
    Akpek, Ali
    COATINGS, 2021, 11 (01) : 1 - 17
  • [43] Growth kinetics of stoichiometric SiC layers formed by high fluence carbon implantation into silicon using a metal vapor vacuum arc ion source
    Wang, L
    Zhao, YE
    Chen, DH
    Wong, SP
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 227 (03): : 282 - 288
  • [44] TAMEK vacuum arc techniques for metal ion and plasma surface engineering
    Tolopa, A
    SURFACE & COATINGS TECHNOLOGY, 1998, 98 (1-3): : 901 - 907
  • [45] Investigation on the Tribology of Co Implanted Stainless Steel Using Metal Vapor Vacuum Arc Ion Source
    Junxia GUO
    Xun CAI
    Qiulong CHEN Key Lab for High Temperature Materials and Testing
    JournalofMaterialsScience&Technology, 2004, (03) : 265 - 268
  • [46] Investigation on the tribology of Co implanted stainless steel using metal vapor vacuum arc ion source
    Guo, JX
    Cai, X
    Chen, QL
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2004, 20 (03) : 265 - 268
  • [47] Vacuum arc ion source for heavy ion fusion
    Liu, F
    Qi, N
    Gensler, S
    Prasad, RR
    Krishnan, M
    Brown, IG
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02): : 819 - 821
  • [48] Electron-beam enhancement of the metal vapor vacuum arc ion source
    Batalin, VA
    Bugaev, AS
    Gushenets, VI
    Hershcovitch, A
    Johnson, BM
    Kolomiets, AA
    Kuibeda, RP
    Kulevoy, TV
    Oks, EM
    Pershin, VI
    Petrenko, SV
    Seleznev, DN
    Yushkov, GY
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (05) : 2884 - 2889
  • [49] METAL VAPOR VACUUM-ARC ION-SOURCE RESEARCH AT ANSTO
    EVANS, PJ
    WATT, GC
    NOORMAN, JT
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10): : 3082 - 3087
  • [50] THE BEIJING METAL VAPOR VACUUM-ARC ION-SOURCE PROGRAM
    ZHANG, HX
    ZHANG, XJ
    ZHOU, FS
    ZHANG, SJ
    LI, Q
    HAN, ZE
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10): : 3088 - 3090
12345