Hydrogen cobalt complexes in p-type silicon

被引:31
|
作者
Jost, W [1 ]
Weber, J [1 ]
Lemke, H [1 ]
机构
[1] TECH UNIV BERLIN, INST WERKSTOFFE ELEKTROTECH, D-10623 BERLIN, GERMANY
关键词
D O I
10.1088/0268-1242/11/4/011
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on three cobalt-hydrogen related deep levels H(50): E-v + 0.09 eV, H(90): E-V + 0.17 eV and H(150): E-V + 0.22 eV. The levels are formed by wet chemical etching or remote hydrogen plasma treatment and successive annealing at 400 K in cobalt-doped float-zone p-type silicon. The level H(150) is bistable and exhibits a fully reversible transition between an electrically active and an electrically neutral configuration after zero-bias or reverse-bias annealing at temperatures between 310 K and 400 K. We tentatively assign H(90) and H(150) to a CoH complex and H(50) to a CoH2 complex.
引用
收藏
页码:525 / 530
页数:6
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