Plasma annealing as an effective method for the crystallization of Bismuth Iron Garnet films

被引：0
|
作者：
Sharda, R. [1 ]
Jeffery, R. D. [3 ]
Martyniuk, M. [1 ]
Woodward, R. C. [2 ]
Dell, J. M. [1 ]
Faraone, L. [1 ]
机构：
[1] Univ Western Australia, Sch Elect Elect & Comp Engn, Crawley, WA 6009, Australia
[2] Univ Western Australia, Sch Phys, Crawley, WA 6009, Australia
[3] Panaroma Synergy Ltd, Balcatta, Australia
来源：
2012 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAD 2012) | 2012年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Oxygen plasma annealing was used to crystallise (BiDy)(3)(FeGa)(5)O-12 (Bi:DyIG) at a temperature of 515 degrees C, which is over 100 degrees C lower compared with conventional thermal annealing. We used a thermal imager to measure and characterise the temperature of the sample with respect to RF power and pressure inside a plasma chamber.
引用
收藏
页码：183 / +
页数：2
相关论文
共 50 条
  • [21] Kinetics of an annealing of radiation defects in epitaxial films of an iron-yttrium garnet
    Kotsyubyns'ky, VO
    Nemoshkalenko, VV
    Ostafijchuk, BK
    Salij, YP
    Fedoriv, VD
    Yurchyshyn, PI
    METALLOFIZIKA I NOVEISHIE TEKHNOLOGII, 2001, 23 (11): : 1449 - 1454
  • [22] CURRENT SENSING USING BISMUTH RARE-EARTH IRON-GARNET FILMS
    KO, M
    GARMIRE, E
    APPLIED OPTICS, 1995, 34 (10): : 1692 - 1696
  • [23] In situ growth of polycrystalline bismuth-iron-garnet films on quartz glass substrate
    Okuda, T
    Kudoh, A
    Yoshihara, S
    Adachi, N
    Ohsato, H
    JOURNAL DE PHYSIQUE IV, 1997, 7 (C1): : 707 - 708
  • [24] ION BEAM SPUTTERED FILMS OF BISMUTH-SUBSTITUTED YTTRIUM IRON GARNET.
    Okuda, T.
    Hayashi, K.
    Koshizuka, N.
    IEEE translation journal on magnetics in Japan, 1985, TJMJ-2 (02): : 136 - 137
  • [25] BISMUTH-SUBSTITUTED IRON-GARNET FILMS PREPARED BY RF DIODE SPUTTERING
    KRUMME, JP
    DOORMANN, V
    ECKART, R
    IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) : 983 - 985
  • [26] CHARACTERISTICS OF LAYER STRUCTURE FORMATION OF BISMUTH-CONTAINING IRON-GARNET FILMS
    FILIPPOV, EI
    ILCHISHIN, OV
    STUPAK, VA
    ZHURNAL TEKHNICHESKOI FIZIKI, 1984, 54 (08): : 1624 - 1627
  • [27] Nonlinear characteristics of magnetooptic Bragg diffraction in bismuth substituted yttrium iron garnet films
    Su, J
    Tsai, CS
    JOURNAL OF APPLIED PHYSICS, 2000, 87 (03) : 1474 - 1481
  • [28] Low Temperature Crystallization of Bismuth Zinc Niobate Thin Films by Pulsed Laser Annealing
    Wang, Junling
    Cheng, Jiangong
    Tian, Lili
    Dechakupt, Tanawadee
    Trolier-McKinstry, Susan
    2006 15TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, 2007, : 29 - +
  • [29] Bismuth induced crystallization of hydrogenated amorphous silicon thin films: effect of annealing time
    Zouini, Meriem
    Khamlich, Saleh
    Dimassi, Wissem
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2019, 30 (07) : 7110 - 7120
  • [30] MAGNETIC AND MAGNETOOPTIC PROPERTIES OF BISMUTH-SUBSTITUTED THULIUM IRON-GARNET FILMS
    HANSEN, P
    TOLKSDORF, W
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) : 4577 - 4579
12345