The use of FT-IR spectroscopy in microtechnologies

被引：0
|
作者：
Guber, AE
机构：
来源：
MIKROCHIMICA ACTA | 1997年
关键词：
microtechnologies; FT-IR; etching; micro heat exchanger; IR filters;
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Analytical studies accompanying the development of microtechnological production methods can be carried out by means of e.g. FT-IR spectroscopy. The chemical reactions taking place during various dry chemical etching processes of silicon can be observed precisely. Microtechnological components such as micro heat exchangers or IR filters can be checked for their functionality.
引用
收藏
页码：639 / 641
页数：3
相关论文
共 50 条
  • [41] FT-IR spectroscopy of crystallizing solution of borates
    Jia, YZ
    Zhou, Y
    Gao, SY
    [J]. CHINESE JOURNAL OF INORGANIC CHEMISTRY, 2001, 17 (05) : 636 - 640
  • [42] PVC plastisols decomposition by FT-IR spectroscopy
    Beltran, M
    Marcilla, A
    [J]. EUROPEAN POLYMER JOURNAL, 1997, 33 (08) : 1271 - 1280
  • [43] FT-IR SPECTROSCOPY OF ELECTROCHEMICALLY SYNTHESIZED POLYPYRROLE
    Jin, Ji-Ye
    Ando, Takumi
    Teramae, Norio
    Haraguchi, Hiroki
    [J]. ANALYTICAL SCIENCES, 1991, 7 : 1593 - 1594
  • [44] FT-IR SPECTROSCOPY OF SOLID-SURFACES
    ZACHMANN, G
    [J]. JOURNAL OF MOLECULAR STRUCTURE, 1984, 115 (MAR) : 465 - 468
  • [45] TOPICAL PROTECTANT EVALUATION BY FT-IR SPECTROSCOPY
    BRAUE, EH
    PANNELLA, MG
    [J]. APPLIED SPECTROSCOPY, 1990, 44 (06) : 1061 - 1063
  • [46] Depth profiling by FT-IR photoacoustic spectroscopy
    McClelland, JF
    Jones, RW
    Bajic, SJ
    Power, JF
    [J]. MIKROCHIMICA ACTA, 1997, : 613 - 614
  • [47] CHOLESTEROL "DIPALMITOYLPHOSPHATIDYLETHANOLAMINE INTERACTIONS BY FT-IR SPECTROSCOPY
    BROWN, KG
    [J]. BIOCHEMISTRY, 1983, 22 (15) : A29 - A29
  • [48] Determination of Ethanol in Gasoline by FT-IR Spectroscopy
    Conklin, Alfred, Jr.
    Goldcamp, Michael J.
    Barrett, Jacob
    [J]. JOURNAL OF CHEMICAL EDUCATION, 2014, 91 (06) : 889 - 891
  • [49] SURFACE ANALYSIS USING FT-IR SPECTROSCOPY
    ISHIDA, H
    KOENIG, JL
    [J]. INTERNATIONAL LABORATORY, 1978, (MAY-): : 49 - &
  • [50] RHEOPHOTOACOUSTIC FT-IR SPECTROSCOPY AND WORK OF ADHESION
    PENNINGTON, BD
    URBAN, MW
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 208 : 6 - PMSE
12345