The use of FT-IR spectroscopy in microtechnologies

被引：0
|
作者：
Guber, AE
机构：
来源：
MIKROCHIMICA ACTA | 1997年
关键词：
microtechnologies; FT-IR; etching; micro heat exchanger; IR filters;
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Analytical studies accompanying the development of microtechnological production methods can be carried out by means of e.g. FT-IR spectroscopy. The chemical reactions taking place during various dry chemical etching processes of silicon can be observed precisely. Microtechnological components such as micro heat exchangers or IR filters can be checked for their functionality.
引用
收藏
页码：639 / 641
页数：3
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