The use of FT-IR spectroscopy in microtechnologies

被引：0
|
作者：
Guber, AE
机构：
来源：
MIKROCHIMICA ACTA | 1997年
关键词：
microtechnologies; FT-IR; etching; micro heat exchanger; IR filters;
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Analytical studies accompanying the development of microtechnological production methods can be carried out by means of e.g. FT-IR spectroscopy. The chemical reactions taking place during various dry chemical etching processes of silicon can be observed precisely. Microtechnological components such as micro heat exchangers or IR filters can be checked for their functionality.
引用
收藏
页码：639 / 641
页数：3
相关论文
共 50 条
  • [1] PRINCIPLES AND USE OF FT-IR SPECTROSCOPY
    LINDSTROM, M
    TROLLSAS, P
    [J]. SVENSK PAPPERSTIDNING-NORDISK CELLULOSA, 1990, 93 (06): : 66 - &
  • [2] FT-IR and NIR spectroscopy
    不详
    [J]. NACHRICHTEN AUS CHEMIE TECHNIK UND LABORATORIUM, 1998, 46 (04): : M1 - +
  • [3] FT-IR SPECTROSCOPY IN CATALYSIS
    MINK, J
    [J]. ACTA PHYSICA HUNGARICA, 1987, 61 (01) : 71 - 74
  • [4] APPLICATIONS OF FT-IR SPECTROSCOPY
    MOZAYENI, F
    [J]. JOURNAL OF THE AMERICAN OIL CHEMISTS SOCIETY, 1988, 65 (09) : 1420 - 1426
  • [5] The use of FT-IR spectroscopy in the identification of vegetable oils adulteration
    Alexa, Ersilia
    Dragomirescu, Anca
    Pop, Georgeta
    Jianu, Calin
    Dragos, Dan
    [J]. JOURNAL OF FOOD AGRICULTURE & ENVIRONMENT, 2009, 7 (02): : 20 - 24
  • [6] Use of FT-IR internal reflection spectroscopy in combinatorial chemistry
    Gremlich, HU
    Berets, SL
    [J]. APPLIED SPECTROSCOPY, 1996, 50 (04) : 532 - 536
  • [7] Analysis of diamonds by FT-IR Spectroscopy
    Lowry, Stephen
    [J]. SPECTROSCOPY, 2007, 22 (09) : 38 - 40
  • [8] FT-IR spectroscopy inside a glovebox
    [J]. 2007, Advanstar Communications, One Park Avenue, New York, NY 10016, United States (22):
  • [9] MICROBIOLOGICAL CHARACTERIZATIONS BY FT-IR SPECTROSCOPY
    NAUMANN, D
    HELM, D
    LABISCHINSKI, H
    [J]. NATURE, 1991, 351 (6321) : 81 - 82
  • [10] FT-IR SPECTROSCOPY IN UNDERGRADUATE EDUCATION
    SINGH, MM
    SZAFRAN, Z
    PIKE, RM
    DAVIS, JD
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1992, 204 : 105 - CHED
12345