Populations of argon metastable states in an argon-silane plasma of a high-frequency electric discharge

被引:0
|
作者
Baisova, B. T. [1 ]
Strunin, V. I. [1 ]
Strunina, N. N. [1 ]
Khudaiergenov, G. Zh. [1 ]
机构
[1] FM Dostoevskii Omsk State Univ, Omsk 644077, Russia
关键词
populations of metastable states; intensity of spectral line; balance equation; population and de-excitation (depopulation) processes;
D O I
10.1007/s10812-008-9095-5
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
We have determined the absolute populations of argon metastable states in the plasma of a high-frequency discharge in a pure argon atmosphere and in a mixture of argon and silane.
引用
收藏
页码:739 / 742
页数:4
相关论文
共 50 条
  • [31] DISEQUILIBRIUM IN AN ARGON PLASMA-JET FROM A HIGH-FREQUENCY INDUCTION DISCHARGE AT ATMOSPHERIC-PRESSURE
    DRESVIN, SV
    KLUBNIKIN, VS
    HIGH TEMPERATURE, 1971, 9 (03) : 437 - +
  • [32] POPULATIONS OF SOME EXCITED-STATES OF SINGLY IONIZED ARGON IN AN ARGON LASER DISCHARGE
    ROSS, JN
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (10) : 1426 - 1433
  • [33] Discharge characteristic of very high frequency capacitively coupled argon plasma
    殷桂琴
    王兢婧
    高闪闪
    姜永博
    袁强华
    ChinesePhysicsB, 2021, 30 (09) : 259 - 264
  • [34] Discharge characteristic of very high frequency capacitively coupled argon plasma*
    Yin, Gui-Qin
    Wang, Jing-Jing
    Gao, Shan-Shan
    Jiang, Yong-Bo
    Yuan, Qiang-Hua
    CHINESE PHYSICS B, 2021, 30 (09)
  • [35] DETERMINATION OF CONDUCTIVITY OF A HIGH-FREQUENCY INDUCTION DISCHARGE IN ARGON BY CALORIMETRIC AND SPECTRAL METHODS
    DRESVIN, SV
    DONSKOI, AV
    GOLDFARB, VM
    SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1966, 10 (09): : 1270 - &
  • [36] Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon-silane capacitive radio-frequency plasmas
    Shen, Z
    Kortshagen, U
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (01): : 153 - 159
  • [37] Crystallization of nanostructured silicon films deposited under a low-pressure argon-silane pulsed-glow discharge: Correlation with the plasma duration
    Hadjadj, A
    Beorchia, A
    Boufendi, L
    Huet, S
    Cabarrocas, PRI
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2001, 19 (01): : 124 - 129
  • [38] ELECTRON-ENERGY DISTRIBUTION FUNCTION AND ATOM IONIZATION PROCESSES IN HIGH-FREQUENCY DISCHARGE MERCURY ARGON PLASMA
    WAGNER, SD
    NISCONEN, IS
    JOURNAL DE PHYSIQUE, 1979, 40 : 209 - 210
  • [39] ARGON ION LASER WITH HIGH-FREQUENCY STABILITY
    CHEBOTAYEV, VP
    GOLDORT, VG
    GONCHAROV, AN
    OHM, AE
    SKVORTSOV, MN
    METROLOGIA, 1990, 27 (02) : 61 - 64
  • [40] INFLUENCE OF METASTABLE ARGON ATOMS AND DUST PARTICLES ON GAS DISCHARGE PLASMA
    Fedoseev, A. V.
    Sukhinin, G. I.
    UKRAINIAN JOURNAL OF PHYSICS, 2011, 56 (12): : 1272 - 1275