Model and Measurement Technique for Temperature Dependent Electrothermal Parameters of Microbolometer Structures

A model and a measurement technique for the temperature dependent thermal impedance of microbolometer structures are presented. It is demonstrated that especially for automotive applications with an extended ambient temperature regime, a temperature impact on the thermal impedance has to be considered in electrothermal modeling. The modeling parameters can be determined with a demonstrated measurement technique which only relies on a single long pulse measurement and standard measurement equipment.