Electron ionization of open/closed chain isocarbonic molecules relevant in plasma processing: Theoretical cross sections

被引：11

作者：

Patel, Umang R. ^{[1
,2
]}

Joshipura, K. N. ^{[2
]}

Kothari, Harshit N. ^{[3
]}

Pandya, Siddharth H. ^{[2
]}

机构：

[1] Gandhinagar Inst Technol, Gandhinagar 382721, Gujarat, India

[2] Sardar Patel Univ, Vallabh Vidyanagar 388120, Gujarat, India

[3] Universal Coll Engn & Technol, Gandhinagar 382721, Gujarat, India

来源：

JOURNAL OF CHEMICAL PHYSICS | 2014年 / 140卷 / 04期

关键词：

POLYATOMIC-MOLECULES; C4F6; MOLECULES; SCATTERING; IMPACT; RADICALS; C-C4F8; HYDROCARBONS; ISOMER; C3F6;

D O I：

10.1063/1.4862056

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this paper, we report theoretical electron impact ionization cross sections from threshold to 2000 eV for isocarbonic open chain molecules C4H6, C4H8, C4F6 including their isomers, and closed chain molecules c-C4H8 and c-C4F8. Theoretical formalism employed presently, viz., Complex Scattering Potential-ionization contribution method has been used successfully for a variety of polyatomic molecules. The present ionization calculations are very important since results available for the studied targets are either scarce or none. Our work affords comparison of C-4 containing hydrocarbon versus fluorocarbon molecules. Comparisons of the present ionization cross sections are made wherever possible, and new ionization data are also presented. (C) 2014 AIP Publishing LLC.

引用

页数：8

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