Electron ionization of open/closed chain isocarbonic molecules relevant in plasma processing: Theoretical cross sections

被引：11
|
作者：
Patel, Umang R. [1 ,2 ]
Joshipura, K. N. [2 ]
Kothari, Harshit N. [3 ]
Pandya, Siddharth H. [2 ]
机构：
[1] Gandhinagar Inst Technol, Gandhinagar 382721, Gujarat, India
[2] Sardar Patel Univ, Vallabh Vidyanagar 388120, Gujarat, India
[3] Universal Coll Engn & Technol, Gandhinagar 382721, Gujarat, India
来源：
JOURNAL OF CHEMICAL PHYSICS | 2014年 / 140卷 / 04期
关键词：
POLYATOMIC-MOLECULES; C4F6; MOLECULES; SCATTERING; IMPACT; RADICALS; C-C4F8; HYDROCARBONS; ISOMER; C3F6;
D O I：
10.1063/1.4862056
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this paper, we report theoretical electron impact ionization cross sections from threshold to 2000 eV for isocarbonic open chain molecules C4H6, C4H8, C4F6 including their isomers, and closed chain molecules c-C4H8 and c-C4F8. Theoretical formalism employed presently, viz., Complex Scattering Potential-ionization contribution method has been used successfully for a variety of polyatomic molecules. The present ionization calculations are very important since results available for the studied targets are either scarce or none. Our work affords comparison of C-4 containing hydrocarbon versus fluorocarbon molecules. Comparisons of the present ionization cross sections are made wherever possible, and new ionization data are also presented. (C) 2014 AIP Publishing LLC.
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页数：8
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