Electron ionization of open/closed chain isocarbonic molecules relevant in plasma processing: Theoretical cross sections

In this paper, we report theoretical electron impact ionization cross sections from threshold to 2000 eV for isocarbonic open chain molecules C4H6, C4H8, C4F6 including their isomers, and closed chain molecules c-C4H8 and c-C4F8. Theoretical formalism employed presently, viz., Complex Scattering Potential-ionization contribution method has been used successfully for a variety of polyatomic molecules. The present ionization calculations are very important since results available for the studied targets are either scarce or none. Our work affords comparison of C-4 containing hydrocarbon versus fluorocarbon molecules. Comparisons of the present ionization cross sections are made wherever possible, and new ionization data are also presented. (C) 2014 AIP Publishing LLC.