Spectroscopic ellipsometry study on the optical dielectric properties of silver platinum alloy thin films

被引：11

作者：

Yang, Guang ^{[1
]}

Fu, Xiao-Jian ^{[1
]}

Sun, Jing-Bo ^{[1
]}

Zhou, Ji ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Mat Sci & Engn, Beijing 100084, Peoples R China

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2013年 / 551卷

基金：

美国国家科学基金会; 国家高技术研究发展计划(863计划);

关键词：

Dielectric functions; Silver platinum alloy films; Magnetron sputtering; Variable angle spectroscopic ellipsometry; Joint density of states function; STRUCTURAL-PROPERTIES; AG; SURFACE; CONSTANTS; PLASMONICS; METAMATERIALS; PHYSICS; LENSES; ENERGY; COPPER;

D O I：

10.1016/j.jallcom.2012.10.033

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Optical properties of alpha-phase Ag-Pt alloy films were investigated by variable angle spectroscopic ellipsometry. The silver platinum alloy films were deposited onto silicon substrates by direct current (DC) magnetron sputtering. It is observed that the dielectric functions of Ag-Pt alloy films increase with the increase of platinum concentration in the alloy. For the Ag-25 at.% Pt alloy films annealed at 300 degrees C, the imaginary part of dielectric permittivity is significantly decreased compared with the one before annealing. During the data simulation, the effective medium theory model was employed to characterize the surface roughness layer. X-ray diffraction (XRD) was performed to study the phase structure and grain size of the as-deposited alloy films. Two typical interband transitions around 1.9 and 3.1 eV which involve the d bands and Fermi levels were found in the silver platinum alloy films. The silver platinum alloy films may be a good material for plasmonics and metamaterials devices. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：352 / 359

页数：8

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